Design and Fabrication of CMOS Microstructures to Locally Synthesize Carbon Nanotubes for Gas Sensing

Roy, Avisek ; Azadmehr, Mehdi ; Ta, Bao Q. ; Häfliger, Philipp ; Aasmundtveit, Knut E.

Sensors (Basel, Switzerland), 2019-10, Vol.19 (19), p.4340 [Periódico revisado por pares]

Basel: MDPI AG

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