Temperature Dependence of Sensitivity of Silicon Integrated Mechanical Transducer in The Temperature Range from -60°C to +200°C
Tikhomirov, Michael Y ; Spalek, Yurii M ; Borshchev, Viacheslav N
Technology. Technology of Instrument Making: Scientific and Technical Collection, 1988, Vol.13 (2), p.80-100
Unpublished
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