Accurate calibration for the quantification of the Al content in AlGaN epitaxial layers by energy-dispersive X-ray spectroscopy in a Transmission Electron Microscope

Amari, H ; Lari, L ; Zhang, H Y ; Geelhaar, L ; Chèze, C ; Kappers, M J ; McAleese, C ; Humphreys, C J ; Walther, T

Journal of physics. Conference series, 2011-11, Vol.326 (1), p.012028-6 [Periódico revisado por pares]

Bristol: IOP Publishing

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