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Wear and oxidation behavior of reactive sputtered δ-(Ti,Mo)N films deposited at different nitrogen gas flow rates

Komiyama, S. ; Sutou, Y. ; Oikawa, K. ; Koike, J. ; Wang, M. ; Sakurai, M.

Tribology international, 2015-07, Vol.87, p.32-39 [Periódico revisado por pares]

Elsevier Ltd

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  • Título:
    Wear and oxidation behavior of reactive sputtered δ-(Ti,Mo)N films deposited at different nitrogen gas flow rates
  • Autor: Komiyama, S. ; Sutou, Y. ; Oikawa, K. ; Koike, J. ; Wang, M. ; Sakurai, M.
  • Assuntos: Coating ; Debris ; Deposition ; Gas flow ; Oxidation ; Oxides ; Self-lubricating ; Tribology ; Wear ; Wear resistance
  • É parte de: Tribology international, 2015-07, Vol.87, p.32-39
  • Notas: ObjectType-Article-1
    SourceType-Scholarly Journals-1
    ObjectType-Feature-2
    content type line 23
  • Descrição: The wear properties of δ-(Ti,Mo)N films deposited at low and high nitrogen gas flow rates (fN2) were investigated. The film at fN2=2.0sccm showed better adhesive wear resistance than that at fN2=0.3sccm. Such improvement in the film at fN2=2.0sccm was due to the formation of Mo oxide debris by wear oxidation. It was found that Mo oxidation more easily occurred in the film at fN2=2.0sccm than in the film at fN2=0.3sccm. Thermodynamic consideration indicated that since the activity of Ti in δ-(Ti,Mo)N decreases with increasing N content, Mo oxidation is promoted in the film at fN2=2.0sccm, which leads to better wear properties. [Display omitted] •Effect of nitrogen content on the wear properties in (Ti,Mo)N film was examined.•The film at a high nitrogen gas flow rate showed a low friction coefficient.•The enhancement of adhesive wear resistance is due to the Mo oxide formation.•Oxidation of Mo easily occurred in the film at a high nitrogen gas flow rate.•Since the activity of Ti decreased with increasing N, Mo oxidation was promoted.
  • Editor: Elsevier Ltd
  • Idioma: Inglês
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