Effects of deposition conditions on the ferroelectric properties of (Al1−xScx)N thin films

Yasuoka, Shinnosuke ; Shimizu, Takao ; Tateyama, Akinori ; Uehara, Masato ; Yamada, Hiroshi ; Akiyama, Morito ; Hiranaga, Yoshiomi ; Cho, Yasuo ; Funakubo, Hiroshi

Journal of applied physics, 2020-09, Vol.128 (11) [Periódico revisado por pares]

Melville: American Institute of Physics

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