Influence of ion energy on damage induced by Au-ion implantation in silicon carbide single crystals

Gentils, Aurélie ; Linez, Florence ; Canizarès, Aurélien ; Simon, Patrick ; Thomé, Lionel ; Barthe, Marie-France

Journal of materials science, 2011-10, Vol.46 (19), p.6390-6395 [Periódico revisado por pares]

Boston: Springer US

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