Diminishing the Induced Strain and Oxygen Incorporation on Aluminium Nitride Films Deposited Using Pulsed Atomic-Layer Epitaxy Techniques at Standard Pressure MOCVD

Abd Rahman, Mohd Nazri ; Shuhaimi, Ahmad ; Abdul Khudus, Muhammad I. M. ; Anuar, Afiq ; Zainorin, Mohamed Zulhakim ; Talik, Noor Azrina ; Chanlek, Narong ; Abd Majid, Wan Haliza

Journal of electronic materials, 2021-04, Vol.50 (4), p.2313-2322 [Periódico revisado por pares]

New York: Springer US

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