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Advanced silicon processing techniques for device engineers

Ashok K Sinha; Steven Hillenius; Institute of Electrical and Electronics Engineers Educational Activities Board

Available at EPELM - Esc. Politécnica-Bib Eng Elet., Mec. e Naval (VC 621.3812 Ad95 v.4 )(GetIt)

Title:
Advanced silicon processing techniques for device engineers
Author: Ashok K Sinha; Steven Hillenius; Institute of Electrical and Electronics Engineers Educational Activities Board
Subjects: Silicon; Integrated circuits -- Very large scale integration; ENGENHARIA ELÉTRICA; MICROELETRÔNICA
Notes: "EV0444-0"--Course notes texts
Description: Tape 1. Deposition techniques / Ashok Sinha -- Tape 2. Advanced lithography techniques / Kunihiko Kasama -- Tape 3. Plasma etching / Dale Ibbotson -- Tape 4. Single waterprocessing and cluster tool / John Hauser
Designed to give device engineers an overview of the state of the art and future processing techniques used for ULSI/VLSI silicon manufacturing
Related Titles: Series:IEDM short course program
Publisher: Piscataway, N.J. IEEE Educational Activities Department
Creation Date: 1993
Format: 4 videocassettes (VHS) (ca. 90 mins. each) sd., col. 1/2 in. course notes (iii, 241 p. : ill. ; 28 cm.).
Language: English

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