Fabrication of high-aspect-ratio electrode array by combining UV-LIGA with micro electro-discharge machining

Hu, Yang-Yang ; Zhu, D. ; Qu, N. S. ; Zeng, Y. B. ; Ming, P. M.

Microsystem technologies : sensors, actuators, systems integration, 2009-04, Vol.15 (4), p.519-525 [Periódico revisado por pares]

Berlin/Heidelberg: Springer-Verlag

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