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Microelectromechanical resonators based on an all polymer/carbon nanotube composite structural material

Sousa, P. M. ; Gutiérrez, M. ; Mendoza, E. ; Llobera, A. ; Chu, V. ; Conde, J. P.

Applied physics letters, 2011-07, Vol.99 (4), p.044104-044104-3 [Periódico revisado por pares]

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Título:
Microelectromechanical resonators based on an all polymer/carbon nanotube composite structural material
Autor: Sousa, P. M. ; Gutiérrez, M. ; Mendoza, E. ; Llobera, A. ; Chu, V. ; Conde, J. P.
Assuntos: Carbon nanotube ; Física ; MEMS ; Microelectromechanical systems ; Nanotubs ; Sistemes microelectromecànics ; Àrees temàtiques de la UPC
É parte de: Applied physics letters, 2011-07, Vol.99 (4), p.044104-044104-3
Descrição: Carboxylated multi-wall carbon-nanotubes (CNTs) monolayers are integrated on microfabricated all-polymer micro-electromechanical systems (pMEMS) resonator bridges on glass substrates. The structural layer of the MEMS bridges is a multilayer blended conductive polymer based on poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) (PEDOT:PSS) to which functionalized CNT monolayers are electrostatically attached. The resonance frequency ( f res ) of electrostatically actuated pMEMS bridges was measured as a function of their length (32-67 μ m) for different multilayer compositions. A significant increase in f res and quality factor ( Q ) with the addition of CNT monolayers to the PEDOT:PSS structural material is observed, demonstrating that CNT monolayers can be used to modulate pMEMS resonator properties.
Editor: American Institute of Physics
Idioma: Inglês

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