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Microfabrication of X-ray Optics by Metal Assisted Chemical Etching: A Review

Romano, Lucia ; Stampanoni, Marco

Micromachines (Basel), 2020-06, Vol.11 (6), p.589 [Periódico revisado por pares]

Switzerland: MDPI AG

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  • Título:
    Microfabrication of X-ray Optics by Metal Assisted Chemical Etching: A Review
  • Autor: Romano, Lucia ; Stampanoni, Marco
  • Assuntos: By products ; catalyst ; Chemical etching ; Etching ; Fluorides ; Fresnel zones ; gold electroplating ; High aspect ratio ; Literature reviews ; Microelectromechanical systems ; Nanowires ; New technology ; Photovoltaic cells ; Review ; silicon ; Silicon substrates ; Solar cells ; Thermoelectric materials ; X ray optics ; X-ray grating interferometry ; X-rays ; Zone plates
  • É parte de: Micromachines (Basel), 2020-06, Vol.11 (6), p.589
  • Descrição: High-aspect-ratio silicon micro- and nanostructures are technologically relevant in several applications, such as microelectronics, microelectromechanical systems, sensors, thermoelectric materials, battery anodes, solar cells, photonic devices, and X-ray optics. Microfabrication is usually achieved by dry-etch with reactive ions and KOH based wet-etch, metal assisted chemical etching (MacEtch) is emerging as a new etching technique that allows huge aspect ratio for feature size in the nanoscale. To date, a specialized review of MacEtch that considers both the fundamentals and X-ray optics applications is missing in the literature. This review aims to provide a comprehensive summary including: (i) fundamental mechanism; (ii) basics and roles to perform uniform etching in direction perpendicular to the Si substrate; (iii) several examples of X-ray optics fabricated by MacEtch such as line gratings, circular gratings array, Fresnel zone plates, and other X-ray lenses; (iv) materials and methods for a full fabrication of absorbing gratings and the application in X-ray grating based interferometry; and (v) future perspectives of X-ray optics fabrication. The review provides researchers and engineers with an extensive and updated understanding of the principles and applications of MacEtch as a new technology for X-ray optics fabrication.
  • Editor: Switzerland: MDPI AG
  • Idioma: Inglês
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  • Realização: ABCD-USP USP   Logos de Redes Sociais: Freepik

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