Towards the Fabrication of High-Aspect-Ratio Silicon Gratings by Deep Reactive Ion Etching
Shi, Zhitian ; Jefimovs, Konstantins ; Romano, Lucia ; Stampanoni, Marco
Micromachines (Basel), 2020-09, Vol.11 (9), p.864
[Periódico revisado por pares]
Switzerland: MDPI
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