Self‐Replication of Deeply Buried Doped Silicon Structures, which Remotely Control the Etching Process: A New Method for Forming a Silicon Pattern from the Bottom Up

Schutzeichel, Christopher ; Kiriy, Nataliya ; Kiriy, Anton ; Voit, Brigitte

Advanced functional materials, 2021-06, Vol.31 (25), p.n/a [Periódico revisado por pares]

Hoboken: Wiley Subscription Services, Inc

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