Metasurface Fabrication by Cryogenic and Bosch Deep Reactive Ion Etching

Baracu, Angela M ; Dirdal, Christopher A ; Avram, Andrei M ; Dinescu, Adrian ; Muller, Raluca ; Jensen, Geir Uri ; Thrane, Paul Conrad Vaagen ; Angelskår, Hallvard

Micromachines (Basel), 2021-04, Vol.12 (5), p.501 [Periódico revisado por pares]

Switzerland: MDPI AG

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