The Method of Low-Temperature ICP Etching of InP/InGaAsP Heterostructures in Cl2-Based Plasma for Integrated Optics Applications

Ishutkin, Sergey ; Arykov, Vadim ; Yunusov, Igor ; Stepanenko, Mikhail ; Smirnov, Vyacheslav ; Troyan, Pavel ; Zhidik, Yury

Micromachines (Basel), 2021-12, Vol.12 (12), p.1535 [Periódico revisado por pares]

Basel: MDPI AG

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