Emissive probe measurement of electron temperature in high‐pressure plasmas (≥1 mTorr)
Shindo, Haruo ; Konishi, Masayoshi ; Tamaru, Takeshi
Rev. Sci. Instrum.; (United States), 1988-09, Vol.59 (9), p.2002-2007 [Periódico revisado por pares]Woodbury, NY: American Institute of Physics
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