Evaluation of Lattice-Spacing of SiGe/Si by NBD using Two-condenser-lens TEM

Yamanaka, Junji ; Oguni, Takuya ; Sano, Yuichi ; Ohshima, Yusuke ; Onogawa, Atsushi ; Hara, Kosuke O. ; Arimoto, Keisuke

Microscopy and microanalysis, 2022-08, Vol.28 (S1), p.2812-2813 [Periódico revisado por pares]

New York, USA: Cambridge University Press

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