Fabrication of Silicon Nanowires by Metal-Assisted Chemical Etching Combined with Micro-Vibration

Huang, Weiye ; Wu, Junyi ; Li, Wenxin ; Chen, Guojin ; Chu, Changyong ; Li, Chao ; Zhu, Yucheng ; Yang, Hui ; Chao, Yan

Materials, 2023-08, Vol.16 (15), p.5483 [Periódico revisado por pares]

Switzerland: MDPI AG

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