Development of dry‐nano‐polishing technique using reactive ion etching for ultra thin titanium wafer

Chino, Teruya ; Watanabe, Yuta ; Tsukiyama, Yosuke ; Sohgawa, Masayuki ; Abe, Takashi

Electronics and communications in Japan, 2021-06, Vol.104 (2), p.n/a

Hoboken: Wiley Subscription Services, Inc

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