Correlation between crystal warpage and swelling of 4H-SiC through implantation and annealing

Ishiji, Kotaro ; Sato, Kiichi ; Fujii, Takashi ; Araki, Tsutomu ; Mouri, Shinichiro ; Sugie, Ryuichi

Semiconductor science and technology, 2020-10, Vol.35 (10), p.105008 [Periódico revisado por pares]

IOP Publishing

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