Electrical resistivity and its thermal coefficient of TiW alloy thin films prepared by two different sputtering systems

Sakurai, Yutaka ; Takeda, Yuya ; Ikeda, Shinji ; Sakamoto, Yoshinori

Physica status solidi. C, 2014-09, Vol.11 (9-10), p.1423-1426 [Periódico revisado por pares]

Berlin: WILEY-VCH Verlag

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