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The evolution of roughness of supersmooth surfaces by ion-beam etching

Barysheva, M. M. ; Vainer, Yu. A. ; Gribkov, B. A. ; Zorina, M. V. ; Pestov, A. E. ; Salashchenko, N. N. ; Khramkov, R. A. ; Chkhalo, N. I.

Bulletin of the Russian Academy of Sciences. Physics, 2012-02, Vol.76 (2), p.163-167 [Periódico revisado por pares]

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Título:
The evolution of roughness of supersmooth surfaces by ion-beam etching
Autor: Barysheva, M. M. ; Vainer, Yu. A. ; Gribkov, B. A. ; Zorina, M. V. ; Pestov, A. E. ; Salashchenko, N. N. ; Khramkov, R. A. ; Chkhalo, N. I.
Assuntos: Crystal structure ; Etching ; Fused quartz ; Hadrons ; Heavy Ions ; High frequencies ; Ion beams ; Nuclear Physics ; Physics ; Physics and Astronomy ; Proceedings of the International Symposium “Nanophysics and Nanoelectronics-2011” ; Surface roughness
É parte de: Bulletin of the Russian Academy of Sciences. Physics, 2012-02, Vol.76 (2), p.163-167
Descrição: The behavior of roughness on surfaces of Cr/Sc multilayer structure, crystalline silicon [100], and fused quartz upon ion beam etching in the region of middle and high frequencies of the spatial spectrum (10 −2 –10 2 μm −1 ) is studied. The possibility of keeping surface roughness at level σ ∼ 0.3 nm upon etching by Ar atoms/ions to depths of up to 10 μm is demonstrated.
Editor: Heidelberg: Allerton Press, Inc
Idioma: Inglês

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