0.18 um modular triple self-aligned embedded split-gate flash memory

Mih, R. ; Harrington, J. ; Houlihan, K. ; Hyun Koo Lee ; Chan, K. ; Johnson, J. ; Bomy Chen ; Jiang Yan ; Schmidt, A. ; Gruensfelder, C. ; Kisang Kim ; Shum, D. ; Lo, C. ; Lee, D. ; Levi, A. ; Chung Lam

2000 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.00CH37104), 2000, p.120-121

IEEE

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