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Stadium Cavity Optical Resonator Fabricated by Focused Ion Beam

Da Silva Filho, Adenir ; Barea, Luis A. ; Vaz, Alfredo R. ; Frateschi, Newton C.

ECS transactions, 2009, Vol.23 (1), p.455-460

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Título:
Stadium Cavity Optical Resonator Fabricated by Focused Ion Beam
Autor: Da Silva Filho, Adenir ; Barea, Luis A. ; Vaz, Alfredo R. ; Frateschi, Newton C.
É parte de: ECS transactions, 2009, Vol.23 (1), p.455-460
Descrição: We have fabricated micro-disk and micro-stadium optical resonators based on conventional InGaAsP/InP multi-quantum well laser epitaxial structures, using a hybrid process by Focused Ion Beam milling and selective wet chemical etching. Resonators with very smooth walls were obtained allowing the observation of optical modes of the stadia with a 15 nm separation. This modal separation is an evidence of the beating between stadium scar modes.
Idioma: Inglês

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