Papers from the 20th International Vacuum Nanoelectronics Conference : 8-12 July 2007, Chicago, Illinois

International Vacuum Nanoelectronics Conference (20th : 2007 : Chicago, Ill.) Heinz Busta; American Vacuum Society.; Institute of Electrical and Electronics Engineers.

Journal of vacuum science & technology. B, Microelectronics and nanometer structures V. 26, no. 2 (Mar./Apr. 2008), p. 688-900 (DLC) 94657460 (OCoLC)23276603

New York : Published by AVS through the American Institute of Physics 2008

Localização: IF - Instituto de Física    (J.Vac.Sci.Technol.B v.26(2)200 )(Acessar)