Vacuum-Packaged Suspended Microchannel Resonant Mass Sensor for Biomolecular Detection
Burg, T.P. ; Mirza, A.R. ; Milovic, N. ; Tsau, C.H. ; Popescu, G.A. ; Foster, J.S. ; Manalis, S.R.
Journal of microelectromechanical systems, 2006-12, Vol.15 (6), p.1466-1476 [Periódico revisado por pares]New York, NY: IEEE
Texto completo disponível