Integrated electrochemical analysis of polyvinyl pyrrolidone (PVP) as the inhibitor for copper chemical mechanical planarization (Cu-CMP)
Yang, Guang ; Wang, Haixu ; Wang, Ning ; Sun, Rong ; Wong, Ching-Ping
Journal of alloys and compounds, 2019-01, Vol.770, p.175-182 [Periódico revisado por pares]Lausanne: Elsevier B.V
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