Integrated electrochemical analysis of polyvinyl pyrrolidone (PVP) as the inhibitor for copper chemical mechanical planarization (Cu-CMP)

Yang, Guang ; Wang, Haixu ; Wang, Ning ; Sun, Rong ; Wong, Ching-Ping

Journal of alloys and compounds, 2019-01, Vol.770, p.175-182 [Periódico revisado por pares]

Lausanne: Elsevier B.V

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