Effect of Moisture in a Vacuum Chamber on the Deposition of c-BN Thin Film using an Unbalanced Magnetron Sputtering Method
Lee, Eun-Sook ; Park, Jong-Keuk ; Lee, Wook-Seong ; Seong, Tae-Yeon ; Baik, Young-Joon
Hanʼguk Seramik Hakhoe chi, 2012-11, Vol.49 (6), p.620-624 [Periódico revisado por pares]Sem texto completo