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MEMS Laser Scanners: A Review

Holmstrom, Sven T. S. ; Baran, Utku ; Urey, Hakan

Journal of microelectromechanical systems, 2014-04, Vol.23 (2), p.259-275 [Periódico revisado por pares]

New York, NY: IEEE

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Título:
MEMS Laser Scanners: A Review
Autor: Holmstrom, Sven T. S. ; Baran, Utku ; Urey, Hakan
Assuntos: Actuation ; Coils ; Diode lasers ; Electrostatics ; Exact sciences and technology ; Fundamental areas of phenomenology (including applications) ; Instruments, apparatus, components and techniques common to several branches of physics and astronomy ; Laser displays ; Lasers ; Magnetic resonance ; Mechanical instruments, equipment and techniques ; MEMS scanners ; Microelectromechanical systems ; Micromechanical devices ; Micromechanical devices and systems ; Mirrors ; Optics ; Optimized production technology ; Physics ; portable projectors ; Projection ; Scanners ; Semiconductor lasers; laser diodes
É parte de: Journal of microelectromechanical systems, 2014-04, Vol.23 (2), p.259-275
Notas: ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 23
Descrição: Laser scanners have been an integral part of MEMS research for more than three decades. During the last decade, miniaturized projection displays and various medical-imaging applications became the main driver for progress in MEMS laser scanners. Portable and truly miniaturized projectors became possible with the availability of red, green, and blue diode lasers during the past few years. Inherent traits of the laser scanning technology, such as the very large color gamut, scalability to higher resolutions within the same footprint, and capability of producing an always-in-focus image render it a very viable competitor in mobile projection. Here, we review the requirements on MEMS laser scanners for the demanding display applications, performance levels of the best scanners in the published literature, and the advantages and disadvantages of electrostatic, electromagnetic, piezoelectric, and mechanically coupled actuation principles. Resonant high-frequency scanners, low-frequency linear scanners, and 2-D scanners are included in this review.
Editor: New York, NY: IEEE
Idioma: Inglês

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MEMS Laser Scanners: A Review

Holmstrom, Sven T. S. ; Baran, Utku ; Urey, Hakan

New York, NY: IEEE

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