Interlaboratory determination of the calibration factor for the measurement of the interstitial oxygen content of silicon by infrared absorption

BAGHDADI, A ; BULLIS, W. M ; CROARKIN, M. C ; YUE-ZHEN LI ; SCACE, R. I ; SERIES, R. W ; STALLHOFER, P ; WATANABE, M

Journal of the Electrochemical Society, 2019-12, Vol.136 (7), p.2015-2024 [Periódico revisado por pares]

Pennington, NJ: Electrochemical Society

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