Preparation of Ti and Fe Composition Gradient Thin Films by Sputtering with Mixed Powder Targets
Satake, Takahiko ; Kawasaki, Hiroharu ; Aoqui, Shin-ichi
e-Journal of Surface Science and Nanotechnology, 2023/02/18, Vol.21(3), pp.218-223 [Periódico revisado por pares]The Japan Society of Vacuum and Surface Science
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