Phase composition and thin structure of the Zr-Y-O layer in Zr-Y-O/Si-Al-N multilayer coatings

Fedorischeva, M. V. ; Kalashnikov, M. P. ; Bozhko, I. A. ; Sergeev, V. P. Panin, Victor E ; Fomin, Vasily M

AIP Conference Proceedings, 2020, Vol.2310 (1) [Periódico revisado por pares]

Melville: American Institute of Physics

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