Fabrication technique of a compressible biocompatible interconnect using a thin film transfer process

Aarts, A A A ; Srivannavit, O ; Wise, K D ; Yoon, E ; Puers, R ; Van Hoof, C ; Neves, H P

Journal of micromechanics and microengineering, 2011-07, Vol.21 (7), p.074012 [Periódico revisado por pares]

Bristol: IOP Publishing

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