Idioma:

Self-Assembly Patterning for sub-15nm Half-Pitch: A Transition from Lab to Fab

BENCHER, Chris ; SMITH, Jeffrey ; HINSBERG, William D ; LIYAN MIAO ; CAI, Cathy ; YONGMEI CHEN ; CHENG, Joy Y ; SANDERS, Daniel P ; TJIO, Melia ; TRUONG, Hoa D ; HOLMES, Steven

Proceedings of SPIE, the International Society for Optical Engineering, 2011, Vol.7970

Texto completo disponível

Citações Citado por

Título:
Self-Assembly Patterning for sub-15nm Half-Pitch: A Transition from Lab to Fab
Autor: BENCHER, Chris ; SMITH, Jeffrey ; HINSBERG, William D ; LIYAN MIAO ; CAI, Cathy ; YONGMEI CHEN ; CHENG, Joy Y ; SANDERS, Daniel P ; TJIO, Melia ; TRUONG, Hoa D ; HOLMES, Steven
Assuntos: Applied sciences ; Electronics ; Exact sciences and technology ; Microelectronic fabrication (materials and surfaces technology) ; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
É parte de: Proceedings of SPIE, the International Society for Optical Engineering, 2011, Vol.7970
Editor: Bellingham WA: SPIE
Idioma: Inglês

Links

Voltar para lista de resultados