Nanometer-scale lithography on the oligosilane Langmuir-Blodgett film
MARUYAMA, H ; KOSAI, N ; SATO, T ; SAGISAKA, S ; SEGAWA, H ; SHIMIDZU, T ; TANAKA, K
Japanese Journal of Applied Physics, 1997, Vol.36 (12A), p.7312-7316 [Periódico revisado por pares]Tokyo: Japanese journal of applied physics
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