Novel Si field emission devices fabrication method based on HI-PS technique for gas sensors development

Michel Oliveira da Silva Dantas Elisabete Galeazzo 1964-; Henrique Estanislau Maldonado Peres; Maycon Max Kopelvski; Francisco Javier Ramírez Fernandez 1944-; International Meeting on Chemical Sensors (12. 2008 Columbus, USA)

Proceedings

Columbus 2008

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