Suppression of Oxide and Interface Charge Density in Radio Frequency Sputtered Ta2O5 Thin Films

Sahoo, Kiran K. ; Pradhan, Diana ; Gartia, Anurag ; Ghosh, Surya P. ; Kar, Jyoti P.

Physica status solidi. A, Applications and materials science, 2024-01, Vol.221 (2), p.n/a [Periódico revisado por pares]

Weinheim: Wiley Subscription Services, Inc

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