Characterization of Al^sub 2^O3 thin films fabricated through atomic layer deposition on polymeric substrates

Ali, Kamran ; Kim, Chang Young ; Choi, Kyung-hyun

Journal of materials science. Materials in electronics, 2014-04, Vol.25 (4), p.1922 [Periódico revisado por pares]

New York: Springer Nature B.V

Texto completo disponível