Singularities of Polishing Substrates GaAs by Chemo-Dynamical and Non-Contact Chemo-Mechanical Methods

Pashchenko, G.A. ; Kravetsky, M.J. ; Fomin, O.V.

Fìzika ì hìmìâ tverdogo tìla (Online), 2016-10, Vol.16 (3), p.560-564 [Periódico revisado por pares]

Vasyl Stefanyk Precarpathian National University

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