Improving Device Characteristics of Dual-Gate IGZO Thin-Film Transistors with Ar–O2 Mixed Plasma Treatment and Rapid Thermal Annealing

Liu, Wei-Sheng ; Hsu, Chih-Hao ; Jiang, Yu ; Lai, Yi-Chun ; Kuo, Hsing-Chun

Membranes (Basel), 2021-12, Vol.12 (1), p.49 [Periódico revisado por pares]

Basel: MDPI AG

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