Deposition of Ti-Zr-O-N films by reactive magnetron sputtering of Zr target with Ti ribbons

da Silva Oliveira, C.I. ; Martínez-Martínez, D. ; Cunha, L. ; Lanceros-Mendez, S. ; Martins, P. ; Alves, E. ; Barradas, N.P. ; Apreutesei, M.

Surface & coatings technology, 2021-03, Vol.409, p.126737, Article 126737 [Periódico revisado por pares]

Lausanne: Elsevier B.V

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