Reactive magnetron sputter deposition of niobium nitride films

Wong, M. S. ; Sproul, W. D. ; Chu, X. ; Barnett, S. A.

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1993-07, Vol.11 (4), p.1528-1533 [Periódico revisado por pares]

Melville, NY: American Institute of Physics

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