Synchrotron x-ray diffraction and transmission electron microscopy studies of interfacial reaction paths and kinetics during annealing of fully-002-textured Al/TiN bilayers

Chun, J.-S. ; Carlsson, J. R. A. ; Desjardins, P. ; Bergstrom, D. B. ; Petrov, I. ; Greene, J. E. ; Lavoie, C. ; Cabral, C. ; Hultman, L.

J. Vac. Sci. Technol. A, 2001-01, Vol.19 (1), p.182-191 [Periódico revisado por pares]

United States

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