3D electron-beam writing at sub-15 nm resolution using spider silk as a resist
Qin, Nan ; Qian, Zhi-Gang ; Zhou, Chengzhe ; Xia, Xiao-Xia ; Tao, Tiger H
Nature communications, 2021-08, Vol.12 (1), p.5133-10, Article 5133 [Periódico revisado por pares]England: Nature Publishing Group
Texto completo disponível