Three-Dimensional Integration of Fully Depleted Silicon-on-Insulator Transistor Substrates for CMOS Image Sensors Using Au/SiO2 Hybrid Bonding and XeF2 Etching
Hagiwara, Kei ; Goto, Masahide ; Iguchi, Yoshinori ; Ohtake, Hiroshi ; Saraya, Takuya ; Toshiyoshi, Hiroshi ; Higurashi, Eiji ; Hiramoto, Toshiro
ECS transactions, 2014, Vol.64 (5), p.391-396The Electrochemical Society, Inc
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