Step height standards based on self-assembly for 3D metrology of biological samples

Heikkinen, V ; Kassamakov, I ; Viitala, T ; Järvinen, M ; Vainikka, T ; Nolvi, A ; Bermúdez, C ; Artigas, R ; Martinez, P ; Korpelainen, V ; Lassila, A ; Hæggström, E

Measurement science & technology, 2020-09, Vol.31 (9), p.94008 [Periódico revisado por pares]

IOP Publishing

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