Characterization and metrology for ULSI technology 2005, Richardson, Texas, 15-18 March 2005

International Conference on Characterization and Metrology for ULSI Technology (5th : 2005 : Richardson, Tex.) David G Seiler; National Institute of Standards and Technology (U.S.)

Melville, N.Y. : American Institute of Physics 2005

Localização: IF - Instituto de Física    (CR282 ) e outros locais(Acessar)