High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology
Sarajlic, Edin ; Yamahata, Christophe ; Berenschot, Erwin ; Tas, Niels ; Fujita, Hiroyuki ; Krijnen, Gijs
Micromachines (Basel), 2010-09, Vol.1 (2), p.48-67 [Periódico revisado por pares]Basel: MDPI AG
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