Structural and Chemical Analysis of a Silicon Nitride Film on GaAs by Null Ellipsometry

Alterovitz, S. A. ; Bu-Abbud, G. H. ; Woollam, J. A. ; Liu, D. C.

Physica status solidi. A, Applied research, 1984-09, Vol.85 (1), p.69-76

Berlin: WILEY-VCH Verlag

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