Electron density measurement of Ar, N2, O2, and Ar mixtures (with N2 and O2) gas in inductively coupled plasma (ICP) using terahertz time domain spectroscopy

Kim, Sang-Il ; Park, Dong-Woon ; Kim, Heon-Su ; Kim, Hak-Sung

Optics and laser technology, 2025-01, Vol.180, p.111540, Article 111540 [Periódico revisado por pares]

Elsevier Ltd

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